Sealed capacitive sensor for physical measurements

Details Sealed capacitive sensor for physical measurements Sealed capacitive sensor for physical measurements

2006-12-19

2006-12-19

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S718000, C073S724000

Reexamination Certificate

active

07150195

ABSTRACT:
A capacitive-type sensor comprises a glass plate having an electrode formed thereon, and a micromachined structure formed from a semiconductor material and having an insulating rim formed thereon. A conducting seal is formed on the insulating rim and arranged to be bonded to the glass substrate to define an enclosed cavity containing the electrode, to thereby define a capacitive element, the conducting seal being arranged, in use, to have an electrical signal passed there through to determine a capacitance thereof which is indicative of the parameter to be determined by the sensor.

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Jurgen Wibbeler et al., “Parasitic Charging of Dielectric Surfaces in Capacitive Microelectromechanical Systems (MEMS)”, Sensors and Actuators A 71 (1988), Apr. 6, 1998, pp. 74-80.
Abhijeet V. Chavan et al., “Batch-Processed Vacuum-Sealed Capacitive Perssure Sensors”, Journal of Microelectromechanical Systems, pp. 580-588, vol. 10, No. 4, Dec. 2001.

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