Sealed capacitive sensor

Details Sealed capacitive sensor Sealed capacitive sensor

2011-05-10

2011-05-10

Kirkland, III, Freddie (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C073S718000, C073S724000

Reexamination Certificate

active

07938014

ABSTRACT:
A sealed capacitive sensor includes a substrate having a diaphragm forming a first plate of a capacitor; a second fixed plate of the capacitor spaced from the diaphragm and defining a predetermined dielectric gap and a sealing medium connecting together the substrate and fixed plate in an integrated structure and hermetically sealing the gap.

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