Seal member, and substrate storage container using the same

Details Seal member, and substrate storage container using the same Seal member, and substrate storage container using the same

2006-04-18

2006-04-18

Pickard, Alison K. (Department: 3673)

Seal for a joint or juncture

Seal between fixed parts or static contact against...

Contact seal for other than internal combustion engine, or...

C277S641000, C277S644000, C277S651000, C206S710000

Reexamination Certificate

active

07029013

ABSTRACT:
A seal member for a substrate storage container disposed between an opening end portion of a container body and a cover, which container body and cover form the container and which container body has the opening end portion and stores substrates, is disclosed. The seal member comprises a base body section formed of a first material and a covering section formed of a second material and covering at least a part of the base body section, wherein the covering section includes a seal forming portion for forming a seal in contact with one of the container body and the cover.

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