Seal diaphragm structure for pressure measuring device

Details Seal diaphragm structure for pressure measuring device Seal diaphragm structure for pressure measuring device

1995-03-06

1996-11-26

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

With protective separator

G01L 700

Patent

active

055787606

ABSTRACT:
A seal diaphragm structure for a pressure measuring device includes a seal diaphragm, an insulating film, and an p-type semiconductor film. The seal diaphragm has a first surface opposing a target fluid and a second surface contacting a pressure transfer sealed liquid sealed in the pressure measuring device. The insulating film is formed on the first surface of the seal diaphragm. The p-type semiconductor film is formed on the insulating film.

REFERENCES:
patent: 4072056 (1978-02-01), Lee
patent: 5230248 (1993-07-01), Cucci et al.
patent: 5315875 (1994-05-01), Benedikt et al.
patent: 5375473 (1994-12-01), Ikeda et al.

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