Seal device and method for operating the same and substrate...

Details Seal device and method for operating the same and substrate... Seal device and method for operating the same and substrate...

2007-06-19

2007-06-19

Moore, Karla (Department: 1763)

Material or article handling

Process

Of moving material between zones having different pressures...

C414S217000, C414S935000, C414S939000, C414S941000, C118S719000, C118S733000, C156S345310, C156S345320, C384S012000, C384S016000, C277S301000, C277S409000, C277S411000

Reexamination Certificate

active

10404065

ABSTRACT:
The present invention provides a seal device comprising a sealing passage which allows communication between a first space and a second space, and evacuation lines individually connected to the first space and the sealing passage. A gas feed line for feeding dry gas is connected to the sealing passage.

REFERENCES:
patent: 4749283 (1988-06-01), Yokomatsu et al.
patent: 4812101 (1989-03-01), George et al.
patent: 5913978 (1999-06-01), Kato et al.
patent: 6805487 (2004-10-01), Yuasa et al.

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