Seal assembly for a wafer grinding machine

Details Seal assembly for a wafer grinding machine Seal assembly for a wafer grinding machine

1989-04-25

1991-08-06

Schmidt, Frederick R.

Abrasive tool making process, material, or composition

Impregnating or coating an abrasive tool

15257R, B24B 5500, A46B 1700

Patent

active

050366289

ABSTRACT:
A seal assembly is mounted within a grinding machine to separate a grinding wheel from the main portions of a wafer being ground. The seal assembly has a pair of free edges which are disposed to define a V-shaped gap through which the peripheral edge of the wafer passes into grinding relation with the grinding wheel. A perforated hollow tube is also mounted behind the free edges of the strips to blow air onto and across the planar surface of the wafer being ground to prevent accumulation of debris thereon.

REFERENCES:
patent: 2383112 (1945-08-01), Dahlman
patent: 2384660 (1945-09-01), Ward
patent: 2622309 (1952-12-01), Hauk
patent: 3148488 (1964-09-01), Reaser
patent: 3466811 (1969-09-01), Suddarth
patent: 4251171 (1981-02-01), Brett
patent: 4308630 (1982-01-01), Schmidt
patent: 4497496 (1985-02-01), Repella
patent: 4638601 (1987-01-01), Steere
patent: 4793101 (1988-12-01), Dlouhy

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