Seal assembly for a wafer grinding machine

Details Seal assembly for a wafer grinding machine Seal assembly for a wafer grinding machine

1992-07-07

1994-07-26

Rachuba, M.

Abrasive tool making process, material, or composition

Impregnating or coating an abrasive tool

51270, 51105R, B24B 900

Patent

active

053317726

ABSTRACT:
A seal assembly for a wafer grinding machine is mounted on a housing in which a grinding wheel is contained. The seal assembly is formed of a pair of flexible strips which are secured over an opening in a plate mounted on a housing enclosing the grinding wheel for sealingly engaging a respective planar surface of a wafer which is introduced through the opening by a rotatable chuck. The edges of the sealing strips define a V-shaped gap to ensure that the edges are disposed in biased relation against each other and against a wafer which passes between the strips. A tube provided with perforations is disposed to blow air to clear debris from the wafer.

REFERENCES:
patent: 2622309 (1952-12-01), Hauk
patent: 3148488 (1964-09-01), Reaser
patent: 3466811 (1969-09-01), Suddarth
patent: 3553910 (1971-01-01), Hordis
patent: 4241505 (1980-12-01), Bodycomb et al.
patent: 4251171 (1981-02-01), Brett
patent: 4308630 (1982-01-01), Schmidt
patent: 4638601 (1987-01-01), Steere et al.
patent: 4782591 (1988-11-01), DeVito et al.

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