Scrubbing apparatus and scrubbing method

Details Scrubbing apparatus and scrubbing method Scrubbing apparatus and scrubbing method

1998-02-18

2000-05-09

Till, Terrence R.

Brushing, scrubbing, and general cleaning

Machines

Brushing

15102, B08B 304, B08B 310

Patent

active

060585447

ABSTRACT:
A scrubbing apparatus comprises a holding member, which holds the outer circumference of the substrate from its back surface and has an opening to expose the back surface of the held substrate toward the bottom side; a supporting member, which supports substantially the center between two opposed sides of the holding member; a scrubbing brush, which comes in contact with the exposed back surface of the substrate from the bottom side; a brush drive mechanism, which transfers the scrubbing brush along the two opposed sides of the holding member; and a rotation drive mechanism, which drives to rotate the holding member together with the supporting member. Thus, a space can be saved, and the back surface of the substrate can be scrubbed.

REFERENCES:
patent: 4476601 (1984-10-01), Oka
patent: 5345639 (1994-09-01), Tanoue et al.
patent: 5518542 (1996-05-01), Matsukawa et al.
patent: 5518552 (1996-05-01), Tanoue et al.
patent: 5675856 (1997-10-01), Itzkowitz
patent: 5858112 (1999-01-01), Yonemizu
patent: 5868866 (1999-02-01), Maekawa et al.

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