Brushing – scrubbing – and general cleaning – Machines – Brushing
Patent
1992-12-28
1994-02-01
Roberts, Edward L.
Brushing, scrubbing, and general cleaning
Machines
Brushing
15 971, 15 882, 511315, 51235, B08B 1102
Patent
active
052822893
ABSTRACT:
A scrubber cleaner for cleaning the unsucked face and peripheral chamfers of a semiconductor wafer. A wafer holder capable of holding the wafer by vacuum suction and turning the wafer circumferentially, and including a wafer suction head for fixing the wafer on it and a motor to rotate the suction head. A brush assembly including a rotatory plate having a brushing surface on one side consisting of a flat ring portion and a side-of-cylinder portion, and being capable of shifting axially and in radial directions; a motor for rotating the rotatory plate circumferentially; an air cylinder for shifting the rotatory plate axially; and another air cylinder for shifting the rotatory plate in radial directions. The side-of-cylinder portion of the brushing surface axially extends from the inner boundary of the ring portion, and the rotatory plate is disposed such that the flat ring portion of the brushing surface of the brush is opposed to and in parallel to the unsucked face of the wafer which is held on the suction head.
REFERENCES:
patent: 4811443 (1989-03-01), Nishizawa
patent: 5092011 (1992-03-01), Gommori et al.
patent: 5144711 (1992-09-01), Gill, Jr.
Hasegawa Fumihiko
Kudo Hideo
Tsukada Makoto
Uchiyama Isao
Yamada Masayuki
Roberts Edward L.
Shin-Etsu Handotai & Co., Ltd.
LandOfFree
Scrubber apparatus for cleaning a thin disk work does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scrubber apparatus for cleaning a thin disk work, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scrubber apparatus for cleaning a thin disk work will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-572678