Brushing – scrubbing – and general cleaning – Machines – Brushing
Reexamination Certificate
2007-01-02
2007-01-02
Markoff, Alexander (Department: 1746)
Brushing, scrubbing, and general cleaning
Machines
Brushing
C015S077000, C015S097100, C015S102000, C134S006000, C134S902000
Reexamination Certificate
active
10620948
ABSTRACT:
There is disclosed a scrub cleaning device which can reduce cleaning time and which requires no large-scaled device for transferring a substrate to the next cleaning process. The scrub cleaning device comprises: a scrub pad10provided with two annular plate scrubbers11, 11′, and wheels12, 12′ for supporting an inner peripheral surface A of the annular plate scrubber and a surface B opposite a scrub surface so that the scrub surfaces of the two annular plate scrubbers11, 11′ fit each other, and for rotating the scrubber around-the central shaft of the annular plate scrubber; and a guide member (not shown), disposed along the outer periphery of the scrub pad10, for conveying the substrate in the rotation direction of the scrub pad10, and the scrub cleaning of the substrate is performed when the substrate held between the two opposite scrubbers11, 11′ is conveyed in the rotation direction of the scrubbers11, 11′ by rotation of the scrub pad10, and rotated by a friction force generated by abutment on the guide member.
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Kanahara Masahumi
Kouno Hiroshi
Cook Alex McFarron Manzo Cummings & Mehler, Ltd.
Hoya Corporation
Markoff Alexander
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