Scroll-type vacuum pumping apparatus

Details Scroll-type vacuum pumping apparatus Scroll-type vacuum pumping apparatus

1998-08-24

1999-09-07

Thorpe, Timothy S.

Pumps

Diverse pumps

Including rotary nonexpansible chamber type

417205, 418 3, 418 5, 418 552, F04B 2314

Patent

active

059476940

ABSTRACT:
Vacuum pumping apparatus includes a non-scroll type auxiliary pump and a scroll pump disposed in a single housing. The auxiliary pump and the scroll pump are connected in series and are driven by a common motor. Typically, the auxiliary pump has a relatively high pumping speed and the scroll pump has a relatively high compression ratio. The auxiliary pump may be a regenerative blower, a roots-type blower or a screw-type blower. When a co-rotating scroll pump is utilized, a regenerative blower may be formed at or near the outer periphery of a disk on which the non-orbiting scroll blade is mounted. In another configuration, first and second scroll pumps are disposed within a housing. The scroll blade sets of the first and second scroll pumps have different orbiting radii. Scroll pump leakage may be reduced by forming a closed-loop seal around the inlet region of the scroll pump and connecting the inlet region to an intermediate pressure. Scroll pump leakage and contamination may be reduced in a scroll pump structure wherein the drive components and the orbiting scroll blade are located on opposite sides of the non-orbiting scroll blade.

REFERENCES:
patent: 1376291 (1921-04-01), Rolkerr
patent: 5417554 (1995-05-01), Kietzman et al.
patent: 5616015 (1997-04-01), Lieperrt
M. Habalanian, "High Vacuum Technology", Marcel Decker, 1990.

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