Scribing system with particle remover

Cutting – Other than completely through work thickness or through work... – Scoring

Reexamination Certificate

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C083S879000, C083S886000, C083S663000, C083S676000

Reexamination Certificate

active

07415916

ABSTRACT:
Particle removal structure is employed with a scribing tool to remove particles from the surface of a semiconductor wafer being scribed and transport the particles to another location.

REFERENCES:
patent: 3094785 (1963-06-01), Kulicke
patent: 3968712 (1976-07-01), Duncan
patent: 4221150 (1980-09-01), Bergfelt et al.
patent: 4228711 (1980-10-01), Insolio
patent: 4383460 (1983-05-01), Schotter et al.
patent: 5304056 (1994-04-01), Fetterhoff
patent: 5331877 (1994-07-01), Ishii
patent: 5718615 (1998-02-01), Boucher et al.
patent: 5820006 (1998-10-01), Turner
patent: 6238280 (2001-05-01), Ritt et al.
patent: 6595845 (2003-07-01), Mizuno et al.
patent: 6679243 (2004-01-01), Sung
patent: 6722545 (2004-04-01), Yuyama et al.
patent: 6796212 (2004-09-01), Maekawa et al.

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