Screenable moisture-passivated planar index-guided VCSEL

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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Details

C372S050100, C372S043010, C372S046010, C372S045010

Reexamination Certificate

active

07058106

ABSTRACT:
Screenable vertical cavity surface emitting lasers (VCSELs) and methods of manufacturing the same are described. These systems and methods address the unique susceptibility of these devices to damage that otherwise might be caused by moisture intrusion into the etch holes that are used to form the index-guiding confinement regions. In one aspect, a VCSEL includes a vertical stack structure having a top surface. The vertical stack structure includes a top mirror, a bottom mirror, and a cavity region that is disposed between the top mirror and the bottom mirror and includes an active light generation region. At least one of the top mirror and the bottom mirror has at least one layer defining an aperture region. The vertical stack structure defines at least one sidewall area extending from the top surface to at least a depth corresponding to the aperture region. The is VCSEL further includes a defect indicator system that is disposed in a screening region at the sidewall area. The defect indicator system includes an indicator layer with a chemically alterable optical property, and a barrier layer overlying the indicator layer.

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Danielle Chamberlin, et al. “Failure Mode analysis of Oxide VCSELs in high huminity and high temperature” Journal Of Lightwave Technology, vol. 21, No. 4, Apr. 2003, pp. 1013-1019.

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