Scintillator panel and radiation image sensor

Details Scintillator panel and radiation image sensor Scintillator panel and radiation image sensor

2006-03-03

2008-08-05

Hannaher, Constantine (Department: 2884)

Radiant energy

Invisible radiation responsive nonelectric signalling

Luminescent device

Reexamination Certificate

active

07408177

ABSTRACT:
An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.

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