Scintillator panel

Radiant energy – Invisible radiation responsive nonelectric signalling – Luminescent device

Reexamination Certificate

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Reexamination Certificate

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07897938

ABSTRACT:
Comprising a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from said vapor deposition table; a second step of introducing said vapor deposition table having said substrate supported by said target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of said substrate, provided with said scintillator, introduced into said vapor deposition chamber.

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