Radiant energy – Invisible radiant energy responsive electric signalling – With or including a luminophor
Patent
1997-05-29
1999-04-06
Hannaher, Constantine
Radiant energy
Invisible radiant energy responsive electric signalling
With or including a luminophor
2504911, G01B 1500, G01J 100
Patent
active
058922300
ABSTRACT:
A scintillating fiducial pattern, and methods of fabricating and using same, on a substrate or a resist/substrate composite, where the scintillating fiducial pattern is used in a spatial referencing scheme. The invention includes the use of a scintillating fiducial pattern as alignment or reference marks on a resist/substrate composite, into which a pattern or feature is to be defined. The invention includes the use of a scintillating fiducial in a mask alignment scheme. The invention includes the use of a scintillating fiducial grid or grating in conjunction with an energy beam locating method, or spatial-phase-locked electron-beam lithography. Spatial referencing to the scintillating fiducial grid, or grating, may be implemented with a delay-locked loop, which locks the phase of a signal from the scintillating grid, or grating, to the phase of a known signal. The invention includes the use of a scintillating fiducial grating, or grid, or the like, in conjunction with energy beam locating, to pattern a distortion-free grating or grid. The invention includes the use of an optical or combined photon/electron detection scheme to detect the scintillating fiducial pattern or a signal from the scintillating fiducial pattern.
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Goodberlet James G.
Smith Henry I.
Hannaher Constantine
Jiron Darren M.
Massachusetts Institute of Technology
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