Patent
1977-11-14
1979-07-10
Wojciechowicz, Edward J.
357 15, 357 55, 357 68, 357 91, H01L 2980
Patent
active
041609840
ABSTRACT:
The specification describes a Schottky-gate field-effect transistor and related fabrication process wherein thin ion implanted surface stabilization regions are formed between source and gate electrodes and gate and drain electrodes of the device and to a thickness of between 100 and 1,000 angstroms. This is accomplished utilizing the source, gate and drain electrodes as an ion implantation mask against impinging inert ions which render the implanted regions semi-insulating, and this process requires no post-implantation annealing.
REFERENCES:
patent: 3700978 (1972-10-01), North et al.
patent: 3912546 (1975-10-01), Aunsperger et al.
patent: 4015278 (1977-03-01), Fukuta
Cleary Frederick W.
Ladd, Jr. Glenn O.
Bethurum W. J.
Hughes Aircraft Company
MacAllister W. H.
Wojciechowicz Edward J.
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