1988-10-04
1990-02-27
James, Andrew J.
357 232, 357 64, 357 91, H01L 2980
Patent
active
049050613
ABSTRACT:
In a Schottky gate field effect transistor comprising a channel formed by doping donor ions in the surface layer of a compound semiconductor (e.g., GaAs) substrate and performing heat treatment, a Schottky gate electrode formed over the channel, and a source electrode and a drain electrode formed on the respective sides of the Schottky gate electrode, a first and a second regions are formed by implantation of ions which are to become carrier killers, to have respective concentration peaks shallower and deeper than the concentration peak of the donor ions of the channel.
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Nakamura Hiroshi
Ohmuro Kazuhiko
James Andrew J.
OKI Electric Industry Co., Ltd.
Soltz David
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