Fishing – trapping – and vermin destroying
Patent
1990-08-28
1992-08-04
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437177, 437208, 437906, H01L 21265, H01L 2144, H01L 2118
Patent
active
051358786
ABSTRACT:
A Schottky diode has a metal lead electrically connected to the Schottky contact layer wherein the metal lead is metallurgically bonded to the diode for increased reliability, the diode having a Ta--Si--N barrier layer.
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Neppl. et al., "Barrier Properties of TaSi.sub.2 in Contact with Al Metalization Thin Film and Interfaces II. Proceedings of the Symposium" Editor Baglin et al., pp. 587-592.
E. Kolawa et al., "Amorphous Ta--Si--N Thin-Film Alloys as Diffusion Barrier in Al/Si Metallizations", J. Vac. Sci. Technol. A 8(3), 3006, May-Jun., 1990.
M-A. Nicolet et al., "Diffusion Barriers in Layered Contact Structures", J. Vac. Sci. Technol., 19(3), 786, Sep./Oct. 1981.
Chaudhuri Olik
Solid State Devices, Inc.
Trinh Loc Q.
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