Scheduling method and program for a substrate processing...

Details Scheduling method and program for a substrate processing... Scheduling method and program for a substrate processing...

2005-05-03

2005-05-03

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S099000, C700S121000

Reexamination Certificate

active

06889105

ABSTRACT:
A method of preparing a schedule for a substrate processing apparatus. A plurality of lots are processed by the substrate processing apparatus including a plurality of processing sections for processing substrates. An order of processing the lots is determined based on a recipe including a plurality of processing steps for successively processing the lots in the processing sections. The method includes, in determining the processing order, a step of allocating a first processing step for one of the lots, and thereafter allocating, as a next processing step, one of next processing steps for the lots preceded by a processing step having the earliest

REFERENCES:
patent: 5818716 (1998-10-01), Chin et al.
patent: 5838565 (1998-11-01), Hsieh et al.
patent: 6438436 (2002-08-01), Hohkibara et al.
patent: 6490494 (2002-12-01), Yasuda
patent: 8-236491 (1996-09-01), None

Affiliated with

Also associated with

Rating

Scheduling method and program for a substrate processing... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scheduling method and program for a substrate processing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scheduling method and program for a substrate processing... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3446465