Data processing: structural design – modeling – simulation – and em – Simulating electronic device or electrical system
Reexamination Certificate
2007-03-08
2010-06-29
Rodriguez, Paul L (Department: 2123)
Data processing: structural design, modeling, simulation, and em
Simulating electronic device or electrical system
Reexamination Certificate
active
07747424
ABSTRACT:
A modeling approach is disclosed which addresses samples with different regions where the structures exhibit different periodicities. In this approach, a first partial model is generated which defines the shape, material properties and periodicity of the first region. In addition, a second partial model is generated defining the shape, material properties and periodicity of the second region. These two partial models are then merged into a combined model. When optimizing the combined model, the shape and material properties of the first and second models are independently adjusted. The optical responses of the model with differing shapes and material properties are-calculated and compared to a physical sample. This process is iteratively carried out to derive a final combined model that corresponds to a physical sample.
REFERENCES:
patent: 5607800 (1997-03-01), Ziger
patent: 5739909 (1998-04-01), Blayo et al.
patent: 5867276 (1999-02-01), McNeil et al.
patent: 5889593 (1999-03-01), Bareket
patent: 5963329 (1999-10-01), Conrad et al.
patent: 6429943 (2002-08-01), Opsal et al.
patent: 6483580 (2002-11-01), Xu et al.
patent: 6694275 (2004-02-01), Jakadar et al.
patent: 6704661 (2004-03-01), Opsal et al.
patent: 6813034 (2004-11-01), Rosencwaig et al.
patent: 6819426 (2004-11-01), Sezginer et al.
patent: 7099005 (2006-08-01), Fabrikant et al.
patent: 7145664 (2006-12-01), Opsal et al.
patent: 2001/0051856 (2001-12-01), Niu et al.
patent: 2003/0044702 (2003-03-01), Schulz
patent: 2003/0197872 (2003-10-01), Littau et al.
patent: 2004/0070772 (2004-04-01), Shchegrov et al.
patent: 2004/0181768 (2004-09-01), Krukar
patent: 2004/0210402 (2004-10-01), Opsal et al.
patent: 2005/0057760 (2005-03-01), Opsal et al.
patent: 2006/0012803 (2006-01-01), Opsal et al.
patent: 2006/0132806 (2006-06-01), Shchegrov et al.
patent: 2006/0290947 (2006-12-01), Li et al.
Leng Jingmin
Opsal Jon
KLA-Tencor Corporation
Morrison & Foerster / LLP
Rodriguez Paul L
Thangavelu Kandasamy
LandOfFree
Scatterometry multi-structure shape definition with... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scatterometry multi-structure shape definition with..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scatterometry multi-structure shape definition with... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4245920