Scattered light separation

Details Scattered light separation Scattered light separation

2011-03-15

2011-03-15

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237400, C356S601000, C356S638000, C250S372000

Reexamination Certificate

active

07907269

ABSTRACT:
An apparatus for detecting top scattered light from a substrate. A source directs a light onto a position on the substrate. The light thereby reflects off in a specular beam, scatters off the top surface, and scatters off a bottom surface of the substrate. An objective receives the top and bottom scattered light. The objective has a first focal point focused on the position on the top surface of the substrate, and a second focal point focused on a pinhole field stop. The pinhole field stop passes the top scattered light that is focused on the pinhole field stop, and blocks the bottom scattered light. A sensor receives and quantifies the top scattered light.

REFERENCES:
patent: 4749840 (1988-06-01), Piwczyk
patent: 5131023 (1992-07-01), Yasugaki et al.
patent: 5266806 (1993-11-01), Barber
patent: 5331456 (1994-07-01), Horikawa
patent: 5420689 (1995-05-01), Siu
patent: 6088092 (2000-07-01), Chen et al.
patent: 6384910 (2002-05-01), Vaez-Iravani et al.
patent: 6522717 (2003-02-01), Murakami et al.
patent: 6538730 (2003-03-01), Vaez-Iravani et al.
patent: 6954266 (2005-10-01), Tomie
patent: 7005649 (2006-02-01), Tezuka et al.
patent: 7274445 (2007-09-01), Meeks
patent: 7630068 (2009-12-01), Tanaka et al.

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