Scanning unit of an optical position measuring device and...

Details Scanning unit of an optical position measuring device and... Scanning unit of an optical position measuring device and...

2006-09-07

2009-10-06

Bennett, G. Bradley (Department: 2841)

Geometrical instruments

Distance measuring

Scale reading position sensor

C033S706000, C250S23700G

Reexamination Certificate

active

07596880

ABSTRACT:
A scanning unit including a light source for illuminating a scale by a light beam and a detector for detecting the light beam which has been modulated by the scale as a function of a relative position between two objects. An inner chamber of the scanning unit in which the light beam extends is closed off in a dust-proof manner against an outer chamber, and the inner chamber is closed off by a transparent body, through which the light beam passes. The inner chamber is connected with the outer chamber via a filter which is dust-proof, but permeable to gas and vapor.

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