Radiant energy – Ionic separation or analysis – Static field-type ion path-bending selecting means
Patent
1988-05-26
1989-07-04
Arnold, Bruce Y.
Radiant energy
Ionic separation or analysis
Static field-type ion path-bending selecting means
2504911, G02B 2610
Patent
active
048445681
ABSTRACT:
A scanning type projection exposure system includes a source emitting light. The light is applied to a portion of a mask having a preset pattern. At least one optical erect projection sub-system images a portion of the pattern on a substrate. The portion of the pattern corresponds to the portion of the mask exposed to the light. The projection sub-system is subjected to scanning movement. The mask and the substrate are subjected to scanning movement. Relative positions of the mask and the substrate are held fixed during the scanning movement of the mask and the substrate.
REFERENCES:
patent: 4057347 (1977-11-01), Moriyama et al.
patent: 4514858 (1985-04-01), Novak
patent: 4707609 (1987-11-01), Shimamura
Nagano Hiroyuki
Sato Takeo
Suzuki Masaki
Watanabe Toshiyuki
Arnold Bruce Y.
Kachmarik Ronald M.
Matsushita Electric - Industrial Co., Ltd.
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