Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Patent
1982-04-02
1985-02-19
Evans, F. L.
Optics: measuring and testing
By dispersed light spectroscopy
With sample excitation
250227, 2504581, 350 9626, G01N 2163
Patent
active
045002045
ABSTRACT:
A scanning-type lithographic and image-pickup device causes the terminal face of either a projecting optical fiber or a picking-up optical fiber to scan a given object in the plane of real image of an objective lens, projects a light through the projecting optical fiber onto the object, and receives the reflected light or a light of photoluminescence through the picking-up optical fiber. When this device is applied to a spectromicroscope, the quantitative surface information can be spectrally measured with high resolution and high reproducibility. When the device is applied to a contracting-projection exposure device or a selective laser annealing device, positional alignment and exposure pattern correction can be easily effected with high accuracy and high productivity. Simultaneous fabrication of a plurality of electronic components can be also obtained by use of this device.
REFERENCES:
patent: 3494354 (1970-02-01), Yokota et al.
patent: 3942866 (1976-03-01), Roman
patent: 3953730 (1976-04-01), Henry et al.
patent: 4418390 (1983-11-01), Smith et al.
Agency of Industrial Science & Technology
Evans F. L.
Ministry of International Trade & Industry
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