Scanning type exposure apparatus and method and device manufactu

Details Scanning type exposure apparatus and method and device manufactu Scanning type exposure apparatus and method and device manufactu

1995-01-26

1997-03-04

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 69, H01L 2130

Patent

active

056084927

ABSTRACT:
A scanning type exposure apparatus and method includes structure and steps for: scanningly moving a mask and a substrate relative to light pulses; continuously irradiating the light pulse to the substrate through the mask; and controlling an exposure amount of the substrate, wherein the control causes an average value of light quantity of a predetermined number of continuous light pulses to be substantially equal to a target value by controlling the light quantity of a next light pulse, in accordance with an integrated light quantity of a previous number of light pulses.

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