Scanning type exposure apparatus and exposure method

Details Scanning type exposure apparatus and exposure method Scanning type exposure apparatus and exposure method

1996-08-13

1997-04-29

Pendegrass, Joan H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 55, 355 77, H01L 21027

Patent

active

056254369

ABSTRACT:
In a scanning type exposure apparatus for exposing an entire surface of a pattern region on a mask to a substrate by scanning the mask and the substrate with respect to a projection optical system in a predetermined direction with a speed ratio in accordance with a magnification of the projection optical system, there are provided a plurality of illumination optical systems for illuminating respective areas of the pattern region on the mask with respective light fluxes from respective light source; a plurality of projection optical systems arranged so as to correspond to the respective illumination optical systems, the projection optical systems projecting respective images of the areas illuminated by the respective illumination optical systems onto respective projection areas on the substrate; a memory device for obtaining and storing a change of shape of the substrate; a magnification changing device for changing a magnification of at least one of the projection optical systems in accordance with the change of shape of the substrate; and an imaging position changing device for changing the position of said image projected via the at least one projection optical systems in accordance with the change in magnification.

REFERENCES:
patent: Re33836 (1992-03-01), Resor, III et al.
patent: 5172189 (1992-12-01), Mitome
patent: 5291240 (1994-03-01), Jain

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