Scanning tunneling microscope nanoetching method

Details Scanning tunneling microscope nanoetching method Scanning tunneling microscope nanoetching method

1989-02-17

1990-01-23

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

2504922, 346158, 369101, H01J 37305

Patent

active

048960446

ABSTRACT:
A method is described for forming uniform nanometer sized depressions on the surface of a conducting substrate. A tunneling tip is used to apply tunneling current density sufficient to vaporize a localized area of the substrate surface. The resulting depressions or craters in the substrate surface can be formed in information encoding patterns readable with a scanning tunneling microscope.

REFERENCES:
patent: 4785189 (1988-11-01), Wells
patent: 4786922 (1988-11-01), Hosoki et al.
McCord, M. A. and Pease, R. F. W., "Lithography with the Scanning Tunneling Microscope", J. Vac. Sci. Technol. B 4(1), Jan./Feb. 1986.
Abraham, David W., Mamin, H. Jonathon, Ganz, Eric, and Clarke, John, "Surface Modification with the Scanning Tunneling Microscope", IBM J. Res. Develop., vol. 30, No. 5, Sep., 1986.
McCord, M. A., and Pease, R. F. W., "Exposure of Calcium Fluoride Resist with the Scanning Tunneling Microscope", J. Vac. Sci. Technol. B 5(1), Jan./Feb., 1987.
Schneir, J., Sonnenfeld, R., Marti, O., Hansma, P. K., Demuth, J. E., and Hamers, R. J., "Tunneling Microscopy, Lithography, and Surface Diffusion On An Easily Prepared Atomically Flat Gold Surface", J. Appl. Phys. 63, (3), 1 Feb. 1988.
Schneir, J., Marti, O., Remmers, G., Glaser, D., Sonenfeld, R., Drake, B., Hansma, P. K., and Elings, V., "Scanning Tunneling Microscopy and Atomic Force Microscopy of the Liquid-Solid Inteface", J. Vac. Sci. Technol. A 6(2), Mar./Apr., 1988.
McCord, M. A., Kern, D. P., and Chang, T. H. P., "Direct Deposition of 10nm Metallic Features with the Scanning Tunneling Microscope", RC 13840 (#62027) 6/22/88.

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