Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1987-09-24
1989-01-17
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
250311, 2504911, 2504912, H01L 4108, G01N 2300
Patent
active
047989890
ABSTRACT:
A scanning tunneling microscope installed in a sample chamber of a scanning electron microscope includes a probe which is finely movable along the surface of a sample driven by a probe moving mechanism and within an area which is irradiated by an electron beam issuing from the electron microscope. An electron microscope image is attainable by causing the electron beam to scan the sample surface, and a tunneling microscope image by moving the probe. The probe moving mechanism is implemented with an X-, Y- and Z-direction piezoelectric element actuator assembly. A stage to be loaded with a sample is movable in the Z direction driven by an inchworm motion mechanism which uses piezoelectric element actuators.
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A. W. Bailey, Ed. Proceedings of the Annual Meeting of the Electron Microscopy Society of America Copyright 1986.
Koga Yasunori
Miyazaki Yasumichi
Budd Mark O.
Research Development Corporation
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