Scanning treatment apparatus

Details Scanning treatment apparatus Scanning treatment apparatus

1984-03-29

1986-04-01

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

2504922, G21K 108

Patent

active

045800588

ABSTRACT:
Scanning, as of ion beams, in which two radially aligned devices, e.g. ion source and extraction electrode, are isolated from and accurately positioned with respect to one another, while the second device moves arcuately to produce a scanning effect. Advantageously, while one device, e.g. the ion source, is moved by a rotating shaft, the second device, e.g., the extraction electrode, moves on a curved track centered on the axis of the shaft. While the devices are disposed within respective parts of a vacuum chamber, a mechanical synchronizing mechanism, located outside of the chamber, moves the devices via seals. The specific mechanism shown comprises a driven lead screw, an insulating crank for driving a shaft on which an ion source is mounted, and an arcuate motion tracking device which transmits the motion of the insulating crank into the chamber for driving the extraction electrode upon a curved track.

REFERENCES:
patent: 3543717 (1970-12-01), Adachl
patent: 3778626 (1973-12-01), Robertson
patent: 4128765 (1978-12-01), Franks

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