Scanning technique for laser ablation

Details Scanning technique for laser ablation Scanning technique for laser ablation

1993-12-13

1995-03-07

Evans, Geoffrey S.

Electric heating

Metal heating

By arc

2191218, B23K 2600

Patent

active

053960459

ABSTRACT:
A target surface is photoablated by a laser beam by the steps of (a) directing a beam of pulsed UV radiation at a bisecting line on the target surface; (b) scanning the beam in a direction away from the bisecting line to a first edge of the target surface, (c) rotating the target 180 degrees, (d) returning the beam to the bisecting line on the target surface, (e) scanning the beam in a direction away from the bisecting line to the edge opposing the first edge of the target surface; and repeating steps (c), (d) and (e) such that the entire target surface is scanned. This scanning process simultaneously clears away deposited debris and avoids subsequent debris accumulation during the photoablation process.

REFERENCES:
patent: 4455893 (1984-06-01), Astero
patent: 4563565 (1986-01-01), Kampfer et al.
patent: 4965430 (1990-10-01), Curtis et al.
patent: 5257706 (1993-11-01), McIntyre
patent: 5331131 (1994-07-01), Opdyke

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