Registers – Coded record sensors – Particular sensor structure
Patent
1997-03-27
1999-03-16
Le, Thien Minh
Registers
Coded record sensors
Particular sensor structure
235454, G06K 710
Patent
active
058833749
ABSTRACT:
A scanning system is provided for identifying wafers contained within a semiconductor process tool chamber. The scanning system includes bar code scanner attached to a window through the process tool chamber. The bar code scanner can read a bar code displayed on a cassette of wafers while the cassette is contained within a high vacuum, particle-free environment of the process chamber. The window is provided by forming an appeture through the chamber wall. Thereafter, a window assembly, including an interface plate, a transparent member, and a retainer are attached to the load lock chamber wall, generally in alignment with the appeture formed therein. The window assembly permits the displayed bar code to be illuminated with light generated by the scanner. Additionally, the window assembly permits the bar code assembly to detect light reflected from the displayed bar code. The scanner generates a signal as a function of the reflected light which in turn is used to access a memory to identify information relating to the wafers contained within the chamber.
REFERENCES:
patent: 5475892 (1995-12-01), McGuire
patent: 5567927 (1996-10-01), Kahn et al.
patent: 5793030 (1998-08-01), Kelly, Jr.
Advanced Micro Devices , Inc.
Le Thien Minh
Stephenson Eric A.
LandOfFree
Scanning system for identifying wafers in semiconductor process does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning system for identifying wafers in semiconductor process , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning system for identifying wafers in semiconductor process will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-819554