Scanning system for charged and neutral particle beams

Radiant energy – Electrically neutral molecular or atomic beam devices and...

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Details

250398, 250399, 2504931, H01S 100, G01K 108

Patent

active

044423527

ABSTRACT:
A method and a device for irradiating a confined volume of material, generally situated at a substantial depth below surface, with a beam of high energy charged or uncharged (neutral) particles have a characteristic feature that a beam of charged particles (e.g., electrons, protons, or deuterons) coming from a radiation source is scanned electrically in two orthogonal directions. To obtain a scanned beam of neutral particles, for example photons, a scanned beam of electrons is directed into a target which then emits the scanned beam of neutral particles to be incident into the confined volume. The emerging neutral particles will be emitted from the target predominantly in the direction as the incoming charged particles. The device according to the invention includes a beam optical system arranged in the path of a beam of charged particles emerging from a radiation source and having two magnetic scanning arrangements (1a, b and 5a, b, respectively), each of which causes the particle beam to be scanned in one of two orthogonal planes, so that the scanned beam leaves the second scanning magnet from substantially one and the same effective scanning center for both planes.

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patent: 3660658 (1972-05-01), Leboutet et al.
patent: 3840743 (1974-10-01), Tamura et al.
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patent: 4066895 (1978-01-01), Iwanaga
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patent: 4134017 (1979-01-01), Azam et al.

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