Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1998-07-20
2000-03-07
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
060325186
ABSTRACT:
A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides light emitted from the light source onto point on a cantilever during scanning thereof. A moving light beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the light beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.
REFERENCES:
patent: 5388452 (1995-02-01), Harp et al.
patent: 5440920 (1995-08-01), Jung et al.
patent: 5714682 (1998-02-01), Prater et al.
Florin et al., "Atomic Force Microscope with Magnetic Force Modulation", Rev. Sci. Instrum., vol. 65, No. 03, Mar. 1994, pp. 639-643.
Hansma et al., J. Appl. Phys., vol. 76, No. 02, Jul. 15, 1994, pp. 796-799.
Jung et al., "Novel Stationary-Sample Atomic Froce Microscope with Beam-Tracking Lens", Electronic Letters, vol. 29, No. 03, Feb. 4, 1993, pp. 264-266.
Drake Barney
Elings Virgil B.
Grigg David A.
Hansma Paul K.
Massie James
Bright Patrick F.
Digital Instruments, Inc.
Larkin Daniel S.
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