Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1993-08-17
1995-11-07
Williams, Hezron E.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
054638976
ABSTRACT:
A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides a light beam emitted from the laser source onto a point on said cantilever during scanning thereof. A moving laser beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the laser beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.
REFERENCES:
patent: 3013467 (1961-12-01), Minsky
patent: 4914293 (1990-04-01), Hayashi et al.
patent: 4935634 (1990-06-01), Hansma et al.
patent: 4985627 (1991-01-01), Gutierrez et al.
patent: 5025658 (1991-06-01), Elings et al.
patent: 5047633 (1991-09-01), Finlan et al.
patent: 5051646 (1991-09-01), Elings et al.
patent: 5117466 (1992-05-01), Buican et al.
patent: 5127730 (1992-07-01), Brelje et al.
patent: 5136162 (1992-08-01), Miyamoto et al.
patent: 5142145 (1992-08-01), Yasutake
patent: 5144833 (1992-09-01), Amer et al.
patent: 5164791 (1992-11-01), Kubo et al.
patent: 5166516 (1992-11-01), Kajimura
patent: 5172002 (1992-12-01), Marshall
patent: 5198715 (1993-03-01), Elings et al.
patent: 5200617 (1993-04-01), Hayes et al.
patent: 5206702 (1993-04-01), Kato et al.
patent: 5214282 (1993-05-01), Yamaguchi et al.
patent: 5231286 (1993-07-01), Kajimura et al.
patent: 5253516 (1993-10-01), Elings et al.
patent: 5254854 (1993-10-01), Betzig
patent: 5260824 (1993-11-01), Okada et al.
patent: 5266801 (1993-11-01), Elings et al.
patent: 5276324 (1994-01-01), Ohtaki et al.
patent: 5291775 (1994-03-01), Gamble et al.
patent: 5319960 (1994-06-01), Gamble et al.
"Novel Stationary-Sample Atomic Force Microscope with Beam-Tracking Lens," Electronic Letters, vol. 29, No. 3, Feb. 4, 1993, P. S. Jung, et al., pp. 264-266.
"Scanned-Cantilever Atomic Force Microscope," American Institute of Physics (1993), Rev. Sci. Instrum. 64 (4), Apr. 1993, David R. Baselt, et al., pp. 908-911.
"Atomic Force Microscopy for High-Resolution Imaging Cell Biology," Trends in Cell Biology, vol. 2, Jul. 1992, Jan H. Hoh, et al., pp. 208-212.
"A Stand-Alone Scanning Force and Friction Microscope," Ultramicroscopy 42-44 (1992), M. Hipp, et al., pp. 1498-1503.
"A High-Performance Scanning Force Microscope Head Design," American Institute of Physics (1993), Rev. Sci. Instrum. 64 (4), Apr. 1993, Steven M. Clark, et al., pp. 904-907.
"Atomic Force Microscopy Using a Piezoresistive Cantilever," 1991 International Conference on Solid-State Sensors and Actuators, Jun. 24-27, 1991, M. Tortonese, et al., pp. 448-451.
"An Atomic-Resolution Atomic-Force Microscope Implemented Using an Optical Layer", Alexander, et al., J. Appl. Phys. 65(1), Jan. 1, 1989, 1988 American Institute of Physics pp. 164-167.
"Stand-Alone Atomic Force Microscope Featuring Large Scan, Friction Measurement, Atomic Resolution and Capability of Liquid Operation", Putman, et al., SPI vol. 1855 Scanning Probe Microscopies II (1993), pp. 202-208.
"Atomic Resolution with an Atomic Force Microscope Using Piezoresistive Detection", Tortonese, et al., Appl. Phys. Lett. 62(8), Feb. 22, 1993, American Institute of Physics, pp. 384-836.
"Atomic Force Microscopy of Biological Samples at Low Temperature", Prater et al., J. Vac. Sci. Technol. B 9(2), Mar. and Apr. 1991, 1991 American Vacuum Society pp. 989-991.
"A Detailed Analysis of the Optical Beam Deflection Technique for Use in Atomic Force Microscopy", Putnam, et al., J. Appl. Phys. 72(1), Jul. 1, 1992, 1992 American Institute of Physics, pp. 6-12.
"Optical-Beam-Deflection Atomic Force Microscopy: The NACL (001) Surface", Meyer, et al., Appl. Phys. Lett. 56 (21), May 21, 1990, 1990 American Institute of Physics, pp. 2100-2101.
Drake Barney
Elings Virgil B.
Grigg David A.
Hansma Paul K.
Massie James
Digital Instruments, Inc.
Larkin Daniel S.
The Regents of the University of California
Williams Hezron E.
LandOfFree
Scanning stylus atomic force microscope with cantilever tracking does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning stylus atomic force microscope with cantilever tracking, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning stylus atomic force microscope with cantilever tracking will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-191247