Scanning, self-referencing interferometer

Details Scanning, self-referencing interferometer Scanning, self-referencing interferometer

2008-09-02

2008-09-02

Chowdhury, Tarifur R (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

11164228

ABSTRACT:
A scanning, self-referencing interferometer may include a scanning mechanism to scan a path length of a test beam portion of a laser beam. The scanning, self-referencing interferometer may also include a beam adjustment mechanism to control positioning of a centroid of a reference beam portion of the laser beam in the interferometer.

REFERENCES:
patent: 4682025 (1987-07-01), Livingston et al.
patent: 5585921 (1996-12-01), Pepper et al.
patent: 5841125 (1998-11-01), Livingston

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