Scanning pulsed profilometer

Details Scanning pulsed profilometer Scanning pulsed profilometer

1994-04-29

1996-07-23

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356360, G01B 902

Patent

active

055395163

ABSTRACT:
An optical profilometer measures the surface profile of a sample by using a scanning autocorrelator and relating the autocorrelation signals at the scanning frequency, f, and twice the scanning frequency, 2f, to the path length changes in one of the arms. The amplitude of the signal at the scanning frequency is used to control the average position of the scanned arm of the autocorrelator, thereby further extending the linear range of the profilometer. The scanning rate of the autocorrelator is set to be much faster than the mechanical noise so that mechanical fluctuations of the sample produce slowly varying fluctuations in the sample scans.

REFERENCES:
patent: 4358201 (1982-11-01), Makosch
patent: 4422764 (1983-12-01), Eastman
patent: 4576479 (1986-03-01), Downs
patent: 4818110 (1989-04-01), Davidson
patent: 5042949 (1991-08-01), Greenberg et al.
patent: 5299170 (1994-03-01), Shidata et al.
H. K. Wickramasinghe, "Differential Laser Heterodyne Micrometrology", Optical Engineering 24(6), 926-929, Nov./Dec. 1985.
C. C. Williams et al., "Optical Ranging By Wavelength Multiplexed Interferometry", J. Appl. Phys. 60(6), Sep. 1986, pp. 1900-1903.
T. C. Strand, "Optical Three-Dimensional Sensing For Machine Vision", Optical Engineering 24(1), 033-040, Jan./Feb. 1985.

Affiliated with

Also associated with

Rating

Scanning pulsed profilometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning pulsed profilometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning pulsed profilometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-717308