Scanning projection exposure method and apparatus using substrat

Details Scanning projection exposure method and apparatus using substrat Scanning projection exposure method and apparatus using substrat

1994-09-21

1998-08-18

Moses, R. L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 55, G03B 2742

Patent

active

057964670

ABSTRACT:
A transfer method includes a step of disposing a mask and a substrate with a projection optical system interposed therebetween in planes substantially perpendicular to the optical axis thereof; and a step of moving the image plane of the projection optical system and the substrate relative to each other along the optical axis in accordance with a variation in the positional relationship between the mask and the projection optical system along the optical axis while the mask and the substrate are moved perpendicular to the optical axis of the projection optical system, in order to transfer a pattern on the mask onto the substrate.

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