Scanning projection-exposure apparatus and methods

Details Scanning projection-exposure apparatus and methods Scanning projection-exposure apparatus and methods

1997-07-02

2000-02-22

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

Step and repeat

356400, 355 55, G03B 2742, G01B 1100

Patent

active

060286598

ABSTRACT:
Apparatus and methods are disclosed for automatically performing detection of a possible exposure error before scanning exposure of a shot field on a substrate. Upon detection of a possible error, the apparatus will automatically continue an exposure sequence without stopping the apparatus. If the detected error is, e.g., a focusing error, the scanning direction for exposure of the shot field and all subsequent shot fields on the substrate are reversed. If the detected error is, e.g., a synchronization error between the mask and substrate, the prescan distance for the subject shot field is increased and the scanning direction for exposure of the shot field and all subsequent shot fields are reversed.

REFERENCES:
patent: 4488806 (1984-12-01), Takahashi et al.
patent: 5117255 (1992-05-01), Shiraishi et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5473410 (1995-12-01), Nishi
patent: 5543921 (1996-08-01), Uzawa et al.
patent: 5617182 (1997-04-01), Wakamoto et al.
patent: 5793471 (1998-08-01), Kanda et al.

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