Scanning probe optical microscope using a solid immersion lens

Details Scanning probe optical microscope using a solid immersion lens Scanning probe optical microscope using a solid immersion lens

1997-06-19

1999-08-17

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250234, 25022711, 250306, 250307, 359664, G02B 702, G02B 2102, G02B 2106

Patent

active

059397098

ABSTRACT:
A scanning probe microscope uses a high refractive index solid immersion lens (SIL) probe to provide optical images with a resolution better than the diffraction limit in air. The SIL probe has a spherical upper surface and a conical (or pyramidal) lower surface with a sharp tip. The SIL reduces the focused spot size because the spherical surface increases the angle of the marginal rays and the high refractive index material shortens the wavelength. The focused spot generates an evanescent wave having an amplitude that decays exponentially with distance from the SIL. The sharp tip on the lower surface reduces the tip-sample contact area and the tip-sample separation so that sample is within the near-field of the SIL probe. The sample perturbs the evanescent wave and a photodetector monitors characteristics of the light. A cantilever carries the SIL probe and a cantilever deflection sensor permits precise control of tip-sample forces and separation. The cantilever deflection sensor operates in a force feedback loop to maintain the tip-sample gap within the near-field as the SIL probe scans over the sample in a raster pattern to generate optical data.

REFERENCES:
patent: 3013467 (1961-12-01), Minsky
patent: 4604520 (1986-08-01), Pohl
patent: 4681451 (1987-07-01), Guerra et al.
patent: 4947034 (1990-08-01), Wickramasinghe et al.
patent: 5004307 (1991-04-01), Kino et al.
patent: 5018865 (1991-05-01), Ferrell et al.
patent: 5121256 (1992-06-01), Corle et al.
patent: 5125750 (1992-06-01), Corle et al.
patent: 5181080 (1993-01-01), Fanton et al.
patent: 5272330 (1993-12-01), Betzig et al.
patent: 5410151 (1995-04-01), Buckland
patent: 5485536 (1996-01-01), Islam
patent: 5489774 (1996-02-01), Akamine et al.
patent: 5497359 (1996-03-01), Mamin et al.
patent: 5581082 (1996-12-01), Hansma et al.
patent: 5602820 (1997-02-01), Wickramasinghe et al.
patent: 5696372 (1997-12-01), Grober et al.
patent: 5729393 (1998-03-01), Lee et al.
Mansfield, S. M. et al. "Solid Immersion Microscope," App. Phys. Lett., vol. 57 No. 24 Dec. 1990, p. 2615.
Perkowitz, S. et al. "Optical Characterization in Microelectronics Manufacturing," J. Res. Natl. Inst. Stand. Technol., vol. 99, No. 605, 1994 pp. 605-639 (no month).
Synge, E.A. "A Suggested Method for Extending Microscopic Resolution into the Ultramicroscopic Region," Phil. Mag. vol. 6, 1928, (no month).

Affiliated with

Also associated with

Rating

Scanning probe optical microscope using a solid immersion lens does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning probe optical microscope using a solid immersion lens, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe optical microscope using a solid immersion lens will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-316830