Scanning probe microscopy apparatus and techniques

Details Scanning probe microscopy apparatus and techniques Scanning probe microscopy apparatus and techniques

2006-08-22

2006-08-22

Raevis, Robert (Department: 2856)

Measuring and testing

Testing of material

C073S105000

Reexamination Certificate

active

07093509

ABSTRACT:
Scanning probe techniques based on the measurement of impedance spectroscopy using a conductive an SPM tip is provided and applied to the study of local transport properties, especially at a grain boundary. The contributions of the grain boundaries and tip-surface interaction can be distinguished based on the analysis of the equivalent circuit. The technique is applicable for both the spatially resolved study of transport mechanisms of polycrystalline semiconductors and the tip-surface contact quality. A piezoresponse force microscopy technique yields quantitative information about local non-linear dielectric properties and higher order electromechanical coupled of ferroelectrics.

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