Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1991-08-22
1993-07-27
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
250306, H01J 314
Patent
active
052312860
ABSTRACT:
A scanning probe microscope according to the present invention comprises a cantilever having a free end portion and a fixed end portion, the free end portion bearing a probe thereon, a semiconductor laser attached to the fixed end portion of the cantilever, an optical waveguide for guiding a laser beam, emitted from the semiconductor laser, to the free end portion, an optical element for dividing part of a center beam of the laser beam, guided through the optical waveguide, into laser beams in at least two perpendicular directions, a photoelectric transducer for receiving the divided laser beams and converting the laser beams into electrical output signals corresponding thereto, and a differential circuit for receiving the electrical signals and subjecting the signals to predetermined arithmetic processing, thereby detecting a three-dimensional displacement of the free end portion of the cantilever.
REFERENCES:
patent: Re33387 (1990-10-01), Binnig
patent: 5025147 (1991-06-01), Durig et al.
patent: 5060248 (1991-10-01), Dumoulin
"Surface Studies by Scanning Tunneling Microscopy", Physical Review Letters, Jul. 5, 1982, vol. 49, No. 1, pp. 57-61.
"Atomics Force Microscope", Physical Review Letters, Mar. 3, 1986, vol. 56, No. 9, pp. 930-934.
Appl. Phys. Lett. 53 (12), Sep. 19, 1988, 1045-1047 "Novel Optical Approach to Atomic Force Microscopy".
Funazaki Jun
Kajimura Hiroshi
Nakamura Yasushi
Saito Keisuke
Tazaki Hiroshi
Davenport T.
Nelms David C.
Olympus Optical Co,. Ltd.
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