Scanning probe microscope system

Scanning-probe techniques or apparatus; applications of scanning – General aspects of spm probes – their manufacture – or their...

Reexamination Certificate

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Details

C850S053000, C850S056000, C850S057000, C250S306000, C250S307000, C250S442110, C073S105000, C324S724000, C977S849000, C977S851000, C977S860000, C977S872000, C977S873000

Reexamination Certificate

active

07578853

ABSTRACT:
A scanning probe microscope system comprising a hollow probe3,a tube4connected to a rear end32of the hollow probe3,a support table1provided under the hollow probe3,and a substrate2and a means5for washing the hollow probe3that are fixed to the support table1,a sample S passing through the tube4and the hollow probe3,and the substrate2and the washing means5being moved by the support table1such that each of them opposes the hollow probe3.

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