Scanning probe microscope incorporating an optical microscope

Details Scanning probe microscope incorporating an optical microscope Scanning probe microscope incorporating an optical microscope

1996-11-20

1999-09-14

Noland, Thomas P.

Measuring and testing

Surface and cutting edge testing

Roughness

250306, G01B 1130

Patent

active

059525622

ABSTRACT:
A scanning probe microscope includes a cantilever having a probe on its free end, a displacement measuring unit for measuring a displacement of the cantilever caused by an interaction between a specimen and the probe, and a tube actuator for supporting the cantilever and the displacement measuring unit and controlling the position of the probe in a three-dimensional manner, the actuator and the probe being arranged coaxial with each other. The apparatus also includes a special microscopic optical system including a pupil modulating element and an oblique illumination optical system for obliquely illuminating the specimen, which together constitute an optical microscope capable of high-power observation of optically transparent specimens.

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R. Hoffman et al; "Modulation Contrast Microscope"; May 1975; pp. 1169-1176; Applied Optics, vol. 14, No. 5.

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