Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1996-12-10
1998-12-15
Noland, Thomas P.
Measuring and testing
Surface and cutting edge testing
Roughness
250306, G01B 1130
Patent
active
058500383
ABSTRACT:
A scanning probe microscope includes a unit for an SPM measurement on a sample and an optical system for observation of at least the sample. The SPM measurement unit includes a cantilever having a probe on its free end and a detection system for optically detecting the displacement of the cantilever. The detection system includes a source for emitting laser light. The observation optical system includes an objective lens opposed to the sample and an eyepiece enabling an observer's ocular observation. A laser shutter is located in an optical path between the objective lens and the eyepiece. The laser shutter has a switch for detecting its open/close operation. A logic circuit computes an output signal from the switch and an output signal from a controller. Based on the result of the computation, an LD switch circuit causes an LD driver to turn the light source on or off.
REFERENCES:
patent: Re33387 (1990-10-01), Binnig
patent: 5142145 (1992-08-01), Yasutake
patent: 5260824 (1993-11-01), Okada et al.
patent: 5291775 (1994-03-01), Gamble et al.
patent: 5298975 (1994-03-01), Khoury et al.
patent: 5317153 (1994-05-01), Matsuhiro et al.
patent: 5394741 (1995-03-01), Kajimura et al.
patent: 5406833 (1995-04-01), Yamamoto
patent: 5448399 (1995-09-01), Park et al.
patent: 5463897 (1995-11-01), Proter et al.
patent: 5675145 (1997-10-01), Toda et al.
patent: 5675154 (1997-10-01), Lindsay et al.
patent: 5689063 (1997-11-01), Fujiu et al.
Ultramicroscopy 42-44; 1992; pp. 1542-1548; North-Holland, R. Kaneko; S. Oguchi; S. Hara et al; "Atomic Force Microscope Coupled With An Optical Microscope", pub. 1992 month not given.
Patent Abstracts of Europe (WO 08901603A1) Feb. 23, 1989 "Scanning Type Tunnel Microscope" Chiaki Sato et al.
Patent Abstracts of Europe (EP 00640829A2) Mar. 1, 1995 "Scanning Probe Microscope" Chiaki Sato et al.
Patent Abstracts of Japan (07-174768) Jul. 14, 1995 "Scanning Type Probe Microscope" Akitoshi Toda.
Patent Abstracts of Japan (08-304420) Nov. 22, 1996 "Scanning Probe Microscope and Optical Microscope" Toshio Ando et al.
Noland Thomas P.
Olympus Optical Co,. Ltd.
LandOfFree
Scanning probe microscope incorporating an optical microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning probe microscope incorporating an optical microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe microscope incorporating an optical microscope will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1460236