Scanning probe microscope having improved optical access

Details Scanning probe microscope having improved optical access Scanning probe microscope having improved optical access

2011-06-14

2011-06-14

Wells, Nikita (Department: 2881)

Scanning-probe techniques or apparatus; applications of scanning

Monitoring the movement or position of the probe responsive...

By optical means

C850S001000, C850S008000, C850S033000, C250S234000, C250S216000, C073S105000

Reexamination Certificate

active

07962966

ABSTRACT:
A scanning probe microscope and method for using the same are disclosed. The Scanning probe microscope includes a probe mount for connecting a cantilever arm and a probe signal generator. The probe position signal generator generates a position signal indicative of a position of the probe relative to one end of the cantilever arm. The probe position signal generator includes a first light source that directs a light beam at a first reflector positioned on the cantilever arm and a detector that detects a position of the light beam after the light beam has been reflected from the first reflector. A second reflector reflects the light beam after the light beam is reflected from the first reflector and before the light beam enters the detector, the second reflector passing light from a second light source that illuminates the sample.

REFERENCES:
patent: 6339217 (2002-01-01), Kley
patent: 7091476 (2006-08-01), Kley
patent: 7615738 (2009-11-01), Kley
patent: 2002/0092340 (2002-07-01), Prater et al.
patent: 2010/0269232 (2010-10-01), Workman

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