Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1993-03-31
1993-12-28
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
250307, H01J 314
Patent
active
052742300
ABSTRACT:
A scanning probe microscope according to the present invention comprises a cantilever having a free end portion and a fixed end portion, the free end portion bearing a probe thereon, a semiconductor laser attached to the fixed end portion of the cantilever, an optical waveguide for guiding a laser beam, emitted from the semiconductor laser, to the free end portion, an optical element for dividing part of a center beam of the laser beam, guided through the optical waveguide, into laser beams in at least two perpendicular directions, a photoelectric transducer for receiving the divided laser beams and converting the laser beams into electrical output signals corresponding thereto, and a differential circuit for receiving the electrical signals and subjecting the signals to predetermined arithmetic processing, thereby detecting a three-dimensional displacement of the free end portion of the cantilever.
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Funazaki Jun
Kajimura Hiroshi
Nakamura Yasushi
Saito Keisuke
Tazaki Hiroshi
Davenport Teresa
Nelms David C.
Olympus Optical Co,. Ltd.
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