Scanning probe microscope having a single viewing device for on-

Details Scanning probe microscope having a single viewing device for on- Scanning probe microscope having a single viewing device for on-

1995-04-21

1999-03-02

Nguyen, Thong

Optical: systems and elements

Compound lens system

Microscope

359368, 250309, 250311, G02B 2118, G01N 2300

Patent

active

058778918

ABSTRACT:
An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

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