Scanning probe microscope capable of suppressing probe vibration

Details Scanning probe microscope capable of suppressing probe vibration Scanning probe microscope capable of suppressing probe vibration

1994-10-21

1996-08-06

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, G01N 2300

Patent

active

055436145

ABSTRACT:
A scanning probe microscope having a probe for scanning a sample, a piezoelectric unit finely movable in the X, Y and Z directions, and a probe control unit for controlling a fine movement amount of the piezoelectric unit in the Z direction in accordance with a detected interaction between the sample and the probe. A driving unit applies a continuously changing voltage to the piezoelectric unit to drive the piezoelectric unit in one of an X and Y direction to scan along a scan line, a displacement detection unit detects the displacement of the piezoelectric unit along the scan line, and a matching detection unit outputs a coincidence detection signal when the detected displacement of the piezoelectric unit along the scan line coincides with target displacement values corresponding to desired measurement points. A surface data acquiring unit acquires sample surface data based on the Z-directional fine movement amount of the piezoelectric unit each time the matching detection unit outputs a coincidence detection signal.

REFERENCES:
patent: 5210410 (1993-05-01), Barrett
patent: 5323003 (1994-06-01), Shido et al.
H. Kaizuka; "Application of Capacitor Insertion Method to Scanning Tunneling Microscopes"; Oct. 1989; pp. 3119-3122; 1989 American Institute of Physics; Rev. Sci. Instru. 60(10).
R. C. Barrett et al; "Optical Scan-Correction System Applied To Atomic Force Microscopy"; Jun. 1991; pp. 1393-1399; 1991 American Institute of Physics; Rev. Sci.Instru. 62(6).

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