Scanning probe microscope apparatus

Scanning-probe techniques or apparatus; applications of scanning – Particular type of scanning probe microscopy or microscope;... – Atomic force microscopy or apparatus therefor – e.g. – afm probes

Reexamination Certificate

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Details

C850S001000, C850S002000, C850S005000, C977S851000, C977S863000

Reexamination Certificate

active

07904966

ABSTRACT:
There is provided a scanning probe microscope apparatus which has a high sensitivity for the interaction between the cantilever and the sample and comprises a cantilever that can oscillate stably in dynamic mode even when a mechanical Q value is low.A driving signal having a frequency close to the resonant frequency of the cantilever (4) is supplied from the signal generator (9) to the oscillation exciting means (10) to separately (forcibly) oscillate the cantilever (4). And the frequency of the driving signal or the resonant frequency of the cantilever is controlled (by adjusting the distance between the cantilever (4) and the sample (1)), such that the phase difference between the oscillation of the cantilever (4) detected by the oscillation detecting means (5) and the driving signal becomes zero, i.e. the frequency of the driving signal and the resonant frequency of the cantilever (4) match.

REFERENCES:
patent: 5507179 (1996-04-01), Gamble et al.
patent: 5631410 (1997-05-01), Kitamura
patent: 5966053 (1999-10-01), Durig et al.
patent: 2005/0120781 (2005-06-01), Kitamura
patent: 8 166396 (1996-06-01), None
patent: 2003 194699 (2003-07-01), None

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